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Browsing by  AuthorLEE, SANGSUL
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Showing results 1 to 2 of 2
Article
Investigation of correlative parameters to evaluate EUV lithographic performance of PMMA
SCIE
SCOPUS
RSC Advances, vol. 12, no. 5, page. 2589 - 2594, 2022-01
KIM, KANGHYUN
;
LEE, JONG-WON
;
PARK, BYEONG GYU
;
Oh, Hyun-taek
;
Ku, Yejin
;
et al
Conference
Investigation on interaction between EUV photon and hydrogen silsesquioxance
2021 차세대 리소그래피 학술대회, 2021-11-17
LEE, JONG-WON
;
KIM, KANGHYUN
;
PARK, BYEONG GYU
;
LEE, SANGSUL
1
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