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전체 가 나 다 라 마 바 사 아 자 차 카 타 파 하

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Article

JOURNAL OF MICROMECHANICS AND MICROENGINEERING, vol. 10, no. 4, page. 528 - 533, 2000-12

Article

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 12, no. 2, page. 209 - 220, 2003-04

Article

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 10, no. 2, page. 247 - 254, 2001-06

Article

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, vol. 10, no. 2, page. 255 - 262, 2001-06

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