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Prediction study of the theoretical contrast of extreme ultraviolet photoresist by electron beam and EUV exposure test
- Title
- Prediction study of the theoretical contrast of extreme ultraviolet photoresist by electron beam and EUV exposure test
- Authors
- LIM, GEUN BAE; KIM, KANGHYUN; 박병규; 오현택; 이진균; 이상설
- Date Issued
- 2019-08-21
- Publisher
- 한국광학회
- Article Type
- Conference
- Citation
- 2019 차세대 리소그래피 학술대회, 2019-08-21
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Related Researcher
- 임근배LIM, GEUN BAE
- Dept of Mechanical Enginrg