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Cascade domino lithography for single-digit nanometer scale patterning
- Title
- Cascade domino lithography for single-digit nanometer scale patterning
- Authors
- KIM, IN KI; 문정호; 노준석
- Date Issued
- 2019-02-19
- Publisher
- 한국기계연구원/nCOMS
- Article Type
- Conference
- Citation
- The 8th nano-Imprint-Molding-Print Forum (nano-IMP 2019), 2019-02-19
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Related Researcher
- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg