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Effects of High-pressure Hydrogen Annealing on the Ferroelectric Properties of W/Al:HfO2/W Stacks
- Title
- Effects of High-pressure Hydrogen Annealing on the Ferroelectric Properties of W/Al:HfO2/W Stacks
- Authors
- SEUNYEOL, OH; In Keong Yoo; HWANG, HYUNSANG
- Date Issued
- 2020-02-14
- Publisher
- 한국반도체산업협회, 한국반도체연구조합
- Article Type
- Conference
- Citation
- The 27th Korean Conference on Semiconductors / 제 27회 한국반도체학술대회, 2020-02-14
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Related Researcher
- 황현상HWANG, HYUNSANG
- Dept of Materials Science & Enginrg