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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KIM, SEYOUNG | - |
| dc.date.accessioned | 2020-04-14T01:53:40Z | - |
| dc.date.available | 2020-04-14T01:53:40Z | - |
| dc.date.created | 2020-04-13 | - |
| dc.date.issued | 2016-12-05 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/103421 | - |
| dc.publisher | Institute of Electrical and Electronics Engineers | - |
| dc.relation.isPartOf | 2016 IEEE International Electron Devices Meeting | - |
| dc.relation.isPartOf | 2016 IEEE International Electron Devices Meeting | - |
| dc.title | CMOS compatible MIM decoupling capacitor with reliable sub-nm EOT high-k stacks for the 7 nm node and beyond | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 2016 IEEE International Electron Devices Meeting | - |
| dc.citation.conferenceDate | 2016-12-03 | - |
| dc.citation.conferencePlace | US | - |
| dc.citation.title | 2016 IEEE International Electron Devices Meeting | - |
| dc.contributor.affiliatedAuthor | KIM, SEYOUNG | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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