DC Field | Value | Language |
---|---|---|
dc.contributor.author | You, SJ | - |
dc.contributor.author | Kim, HC | - |
dc.contributor.author | Chung, CW | - |
dc.contributor.author | Chang, HY | - |
dc.contributor.author | Lee, JK | - |
dc.date.accessioned | 2015-06-25T02:12:18Z | - |
dc.date.available | 2015-06-25T02:12:18Z | - |
dc.date.created | 2009-02-28 | - |
dc.date.issued | 2003-12-15 | - |
dc.identifier.issn | 0021-8979 | - |
dc.identifier.other | 2015-OAK-0000003860 | en_US |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/10522 | - |
dc.description.abstract | We measured electrical characteristics of capacitively coupled plasma at low pressure (2.67 Pa) with different driving frequencies. From these measurements, we observed a significant change in discharge power characteristics during the frequency increase. While increasing the frequency, a square dependence of power characteristics (Psimilar toI(2)) changes to a linear dependence (Psimilar toI). This observed result reflects that a power dissipation mode transition from an ion-dominated dissipation mode to an electron-dominated dissipation mode takes place during the driving frequency increase. Both the results calculated from a simple sheath model and a particle-in-cell simulation are in a good agreement with the experimental data. (C) 2003 American Institute of Physics. | - |
dc.description.statementofresponsibility | open | en_US |
dc.language | English | - |
dc.publisher | AMER INST PHYSICS | - |
dc.relation.isPartOf | JOURNAL OF APPLIED PHYSICS | - |
dc.rights | BY_NC_ND | en_US |
dc.rights.uri | http://creativecommons.org/licenses/by-nc-nd/2.0/kr | en_US |
dc.title | Mode transition for power dissipation induced by driving frequency in capacitively coupled plasma | - |
dc.type | Article | - |
dc.contributor.college | 전자전기공학과 | en_US |
dc.identifier.doi | 10.1063/1.1621085 | - |
dc.author.google | You, SJ | en_US |
dc.author.google | Kim, HC | en_US |
dc.author.google | Lee, JK | en_US |
dc.author.google | Chang, HY | en_US |
dc.author.google | Chung, CW | en_US |
dc.relation.volume | 94 | en_US |
dc.relation.issue | 12 | en_US |
dc.relation.startpage | 7422 | en_US |
dc.relation.lastpage | 7426 | en_US |
dc.contributor.id | 10158178 | en_US |
dc.relation.journal | JOURNAL OF APPLIED PHYSICS | en_US |
dc.relation.index | SCI급, SCOPUS 등재논문 | en_US |
dc.relation.sci | SCI | en_US |
dc.collections.name | Journal Papers | en_US |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | JOURNAL OF APPLIED PHYSICS, v.94, no.12, pp.7422 - 7426 | - |
dc.identifier.wosid | 000186969900005 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.endPage | 7426 | - |
dc.citation.number | 12 | - |
dc.citation.startPage | 7422 | - |
dc.citation.title | JOURNAL OF APPLIED PHYSICS | - |
dc.citation.volume | 94 | - |
dc.contributor.affiliatedAuthor | Lee, JK | - |
dc.identifier.scopusid | 2-s2.0-0346935299 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 22 | - |
dc.description.scptc | 25 | * |
dc.date.scptcdate | 2018-10-274 | * |
dc.type.docType | Article | - |
dc.subject.keywordPlus | MAGNETIC-FIELD | - |
dc.subject.keywordPlus | RF DISCHARGES | - |
dc.subject.keywordPlus | ELECTRODE SHEATHS | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Physics | - |
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