Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KIM, IN KI | - |
| dc.contributor.author | RHO, JUNSUK | - |
| dc.date.accessioned | 2021-06-01T02:38:50Z | - |
| dc.date.available | 2021-06-01T02:38:50Z | - |
| dc.date.created | 2021-03-02 | - |
| dc.date.issued | 2021-01-27 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/105326 | - |
| dc.publisher | 삼성전자 | - |
| dc.relation.isPartOf | 제 28회 한국 반도체학술대회 | - |
| dc.title | Cascade Domino Lithography for Single-Digit-Nanometer Scale Patterning | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 제 28회 한국 반도체학술대회 | - |
| dc.citation.conferenceDate | 2021-01-25 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 제 28회 한국 반도체학술대회 | - |
| dc.contributor.affiliatedAuthor | KIM, IN KI | - |
| dc.contributor.affiliatedAuthor | RHO, JUNSUK | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg