DC Field | Value | Language |
---|---|---|
dc.contributor.author | CHUNG, YOONYOUNG | - |
dc.contributor.author | SEO, TAEWON | - |
dc.contributor.author | JEON, GILSU | - |
dc.contributor.author | PARK, HYUK | - |
dc.contributor.author | YUN, JUYOUNG | - |
dc.contributor.author | SEONGMIN, PARK | - |
dc.contributor.author | SUWON, SEONG | - |
dc.date.accessioned | 2021-06-01T02:39:02Z | - |
dc.date.available | 2021-06-01T02:39:02Z | - |
dc.date.created | 2021-02-25 | - |
dc.date.issued | 2021-01-27 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/105327 | - |
dc.language | Korean | - |
dc.publisher | 삼성전자, 한국반도체산업협회, 한국반도체연구조합 | - |
dc.relation.isPartOf | 한국반도체학술대회 | - |
dc.title | 수소 플라즈마를 이용한 저온(≤ 150 °C) 고품질 sputtered SiO2 박막 형성 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 한국반도체학술대회 | - |
dc.citation.conferenceDate | 2021-01-25 | - |
dc.citation.conferencePlace | KO | - |
dc.citation.title | 한국반도체학술대회 | - |
dc.contributor.affiliatedAuthor | CHUNG, YOONYOUNG | - |
dc.contributor.affiliatedAuthor | SEO, TAEWON | - |
dc.contributor.affiliatedAuthor | JEON, GILSU | - |
dc.contributor.affiliatedAuthor | PARK, HYUK | - |
dc.contributor.affiliatedAuthor | YUN, JUYOUNG | - |
dc.contributor.affiliatedAuthor | SEONGMIN, PARK | - |
dc.contributor.affiliatedAuthor | SUWON, SEONG | - |
dc.description.journalClass | 2 | - |
dc.description.journalClass | 2 | - |
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