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Defect Engineering을 통한 TiN/H0.5Z0.5O2/TiN 커패시터의 Wake-up Effect와 강유전성 개선
- Title
- Defect Engineering을 통한 TiN/H0.5Z0.5O2/TiN 커패시터의 Wake-up Effect와 강유전성 개선
- Date Issued
- 2021-01-25
- Publisher
- 한국반도체연구조합
- Article Type
- Conference
- Citation
- 제 28회 한국반도체학술대회, 2021-01-25
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Related Researcher
- 황현상HWANG, HYUNSANG
- Dept of Materials Science & Enginrg