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Novel Trap Profiling in Nitride Layer Using Space Program for 3-D NAND Flash Memory

Title
Novel Trap Profiling in Nitride Layer Using Space Program for 3-D NAND Flash Memory
Authors
LEE, JEONG SOOPARK, JOUNG HUNYOON, GILSANGJIN, JAESEOKGO, DONGHYUN
Date Issued
2021-01
Publisher
한국반도체학술대회
URI
https://oasis.postech.ac.kr/handle/2014.oak/105450
Article Type
Conference
Citation
제28회 한국반도체학술대회, 2021-01
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이정수LEE, JEONG SOO
Dept of Electrical Enginrg
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