DC Field | Value | Language |
---|---|---|
dc.contributor.author | KIM, SEOK | - |
dc.date.accessioned | 2021-06-01T05:53:35Z | - |
dc.date.available | 2021-06-01T05:53:35Z | - |
dc.date.created | 2021-05-19 | - |
dc.date.issued | 2016-03 | - |
dc.identifier.issn | 2297-3079 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/105755 | - |
dc.description.abstract | In this work, we use the micro-masonry technique to fabricate nanoplate resonators with integrated electrostatic actuation and capacitive detection in a few steps. Our approach is an alternative solution to the current fabrication methods used to create membranes and plates that usually rely on the selective etching of a sacrificial layer. Highly doped silicon plates were transfer printed using microtip elastomeric stamps onto insulated bases displaying cavities in order to form suspended structures with airtight gaps. By post-processing adequate interconnections, the fabricated resonators were actuated and their resonant frequency measured in a fully integrated manner. The tested nanoplate devices behave as predicted by theory and offer quality factors of more than 30 in air. | - |
dc.language | English | - |
dc.publisher | Frontiers Media S.A. | - |
dc.relation.isPartOf | Frontiers in Mechanical Engineering | - |
dc.title | A Simple Fabrication Process based on Micro-Masonry for the Realization of Nanoplate Resonators with Integrated Actuation and Detection Schemes | - |
dc.type | Article | - |
dc.identifier.doi | 10.3389/fmech.2016.00001 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | Frontiers in Mechanical Engineering, v.2 | - |
dc.citation.title | Frontiers in Mechanical Engineering | - |
dc.citation.volume | 2 | - |
dc.contributor.affiliatedAuthor | KIM, SEOK | - |
dc.identifier.scopusid | 2-s2.0-85065928791 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | Y | - |
dc.type.docType | Article | - |
dc.description.journalRegisteredClass | scopus | - |
dc.description.journalRegisteredClass | other | - |
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