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Enhanced cross-polarization efficiency of a-Si:H metasurfaces via chemical equilibrium in PE-CVD
- Title
- Enhanced cross-polarization efficiency of a-Si:H metasurfaces via chemical equilibrium in PE-CVD
- Date Issued
- 2020-08-26
- Publisher
- SPIE (Society of Photographic Instrumentation Engineers)
- Article Type
- Conference
- Citation
- SPIE optics + photonics 2020, 2020-08-26
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- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg