Micropipe absorption mechanism of pore growth at foreign polytype boundaries in SiC crystals

Abstract

Formation of pores at foreign polytype boundaries in bulk SiC crystals is studied by means of synchrotron radiation phase-sensitive radiography, optical and scanning electron microscopies, and color photoluminescence. It is demonstrated that pores are formed through coalescence of micropipes and extend along the polytype boundaries by means of micropipe absorption. A theoretical model is suggested, which describes the micropipe absorption by an elliptic pore nucleated at the boundary of a foreign polytype inclusion. It is shown that depending on the inclusion distortion, the pore can either be a separate micropipe, or grow up to a certain length, or occupy the whole facet of the inclusion.