Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | KIM, KWANG JAE | - |
| dc.contributor.author | CHOI, SEUNGHYUN | - |
| dc.contributor.author | BAE, YOUNG MOK | - |
| dc.contributor.author | KIM,EN SOO | - |
| dc.contributor.author | HWANG, CHAN HO | - |
| dc.contributor.author | OH, YOUNG CHAN | - |
| dc.contributor.author | LEE, DONG HYEE | - |
| dc.date.accessioned | 2021-06-01T09:04:22Z | - |
| dc.date.available | 2021-06-01T09:04:22Z | - |
| dc.date.created | 2021-03-05 | - |
| dc.date.issued | 2020-07-06 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/106175 | - |
| dc.publisher | 2021 Spring Conference of Korean Society of Quality Management | - |
| dc.relation.isPartOf | 2021 Spring Conference of Korean Society of Quality Management | - |
| dc.title | 반도체 제조 공정 내 웨이퍼 결함 패턴 관련 핵심 설비 탐색 | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 2021 Spring Conference of Korean Society of Quality Management | - |
| dc.citation.conferenceDate | 2020-07-06 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 2021 Spring Conference of Korean Society of Quality Management | - |
| dc.contributor.affiliatedAuthor | KIM, KWANG JAE | - |
| dc.contributor.affiliatedAuthor | CHOI, SEUNGHYUN | - |
| dc.contributor.affiliatedAuthor | BAE, YOUNG MOK | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- 김광재KIM, KWANG JAE
- Dept. of Industrial & Management Eng.