높은 수율, 균일성을 갖는 잉크젯 인쇄 기반 능동형 트랜지스터 어레이

Abstract

Sensor arrays based on thin film transistors (TFTs) have potential for various 2D sensing applications such as electronic skins and image sensors. Achieving high yield and uniformity of TFT array is therefore essential for high performance sensor arrays. In this work, we demonstrate inkjet-printed 10 × 10 active matrix TFT array with high yield and uniformity. We fabricate high performance 5-V operating staggered TFT by inkjet-printing process and extend it to active matrix array. Accordingly, we introduce design rules and optimization process of fabricating inkjet-printed TFT array with high yield. Uniformity of the array are enhanced through channel gap optimization and utilization of hydrophobic bank for uniform channel length and width, respectively. The fabricated array exhibited high yield of 98 % and high uniformity of variation on drain current less than 10 %. Finally, we demonstrate proof-of-concept pressure sensor array on biocompatible Parylene substrate for electronic skin application.