Electrothermal MEMS parallel plate rotation for real time stereoscopic endoscopic imaging
- Title
- Electrothermal MEMS parallel plate rotation for real time stereoscopic endoscopic imaging
- Authors
- Jang, Kyung-Won; Yang, Sung-Pyo; Baek, Seung-Hwan; Kim, Min H.; Jeong, Ki-Hun
- Date Issued
- 2016-01-25
- Publisher
- Institute of Electrical and Electronics Engineers Inc.
- Abstract
- This paper reports MEMS parallel plate rotation (PPR) with electrothermal actuator for real-time stereoscopic imaging. MEMS PPR allows stereoscopic imaging by generating camera shift effect with displacement in ray of the light. The device was designed opto-mechanically to operate in dynamic mode for stability, large rotation angle. The electrothermal actuation rotates over 25° in dynamic mode under low voltage, generating over 80μm baseline that indicates distance between two cameras and decides depth resolution. Finally stereoscopic images was captured by MEMS PPR and high-speed camera and reconstructed. This method can be widely used in miniaturized stereoscopic imaging system based on single camera.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/109426
- Article Type
- Conference
- Citation
- 29th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2016, page. 605 - 608, 2016-01-25
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