Conference
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | LEE, JONG-WON | - |
| dc.contributor.author | KIM, KANGHYUN | - |
| dc.contributor.author | PARK, BYEONG GYU | - |
| dc.contributor.author | LEE, SANGSUL | - |
| dc.date.accessioned | 2022-03-02T02:40:54Z | - |
| dc.date.available | 2022-03-02T02:40:54Z | - |
| dc.date.created | 2022-01-25 | - |
| dc.date.issued | 2021-11-17 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/109744 | - |
| dc.language | Korean | - |
| dc.publisher | 한국광학회 | - |
| dc.relation.isPartOf | 2021 차세대 리소그래피 학술대회 | - |
| dc.title | Investigation on interaction between EUV photon and hydrogen silsesquioxance | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.identifier.bibliographicCitation | 2021 차세대 리소그래피 학술대회 | - |
| dc.citation.conferenceDate | 2021-11-17 | - |
| dc.citation.conferencePlace | KO | - |
| dc.citation.title | 2021 차세대 리소그래피 학술대회 | - |
| dc.contributor.affiliatedAuthor | LEE, JONG-WON | - |
| dc.contributor.affiliatedAuthor | KIM, KANGHYUN | - |
| dc.contributor.affiliatedAuthor | PARK, BYEONG GYU | - |
| dc.contributor.affiliatedAuthor | LEE, SANGSUL | - |
| dc.description.journalClass | 2 | - |
| dc.description.journalClass | 2 | - |
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