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Development of low-optical loss hydrogenated amorphous silicon for metasurface working at visible frequencies via low-temperature plasma-enhanced chemical vapor deposition
- Title
- Development of low-optical loss hydrogenated amorphous silicon for metasurface working at visible frequencies via low-temperature plasma-enhanced chemical vapor deposition
- Date Issued
- 2021-12-16
- Publisher
- 한국유연인쇄전자학회
- Article Type
- Conference
- Citation
- 2021 한국유연인쇄전자학회 학술대회, 2021-12-16
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Related Researcher
- 노준석RHO, JUNSUK
- Dept of Mechanical Enginrg