Microcantilever system incorporating internal resonance for multi-harmonic atomic force microscopy

Abstract

We report a new design concept of micromechanical cantilever system incorporating the 1/3 internal resonance during dynamic mode operation of atomic force microscopy (AFM). The passive amplification of third harmonic triggered through the mechanism of 1/3 internal resonance enables AFM to utilize multiple harmonics in an air environment. Detailed theoretical and experimental studies of the proposed design demonstrate that the multi-harmonic AFM (MH-AFM) is capable of simultaneous topography imaging and compositional mapping with more than 10-fold enhanced sensitivity.