High-reflectivity, broadband monolithic silicon photonic crystal mirrors on two-axis MEMS scanner by transfer-printing

Abstract

We demonstrate a two-axis electrostatic MEMS scanner integrated with high-reflectivity monolithic silicon photonic crystal (PC) mirrors by transfer printing. The PC mirrors show low polarization dependence and reflectivity over 85% in the wavelength range of 1490nm∼1505nm and above 90% over the wavelength band of 1550∼1570nm. The integration of nanophotonic devices on a MEMS platform with transfer printing enables novel devices with more flexible design and new functionality. © 2013 IEEE.