Effect of corrugation structure and shape on the mechanical stiffness of the diaphragm
KCI
- Title
- Effect of corrugation structure and shape on the mechanical stiffness of the diaphragm
- Authors
- 김준수; 문원규
- Date Issued
- 2021-09
- Publisher
- 한국센서학회
- Abstract
- Here, we studied the change in the mechanical stiffness of a diaphragm according to the corrugation pattern. The diaphragm consists of a silicon oxide and nitride double layer; a corrugation pattern was formed by dry etching, and the diaphragm was released by wet etching. The fabrication of the thin film was verified using focused ion beam and scanning electron microscopy images. The mechanical stiffness of the diaphragm was obtained by measuring the surface vibration using a laser Doppler vibrometer while applying external sound pressure. Flat squares, diaphragms with square corrugations, and circular corrugation patterns were measured and compared. The stiffness of the diaphragm with a corrugation structure was found to be smaller than that without a corrugation structure; in particular, circular corrugation showed a better effect because of the high symmetry. Furthermore, the effect of corrugation was theoretically predicted. The proposed corrugated diaphragm showed comparable flexibility with the state-of-the-art MEMS microphone diaphragm.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/110925
- ISSN
- 1225-5475
- Article Type
- Article
- Citation
- 센서학회지, vol. 30, no. 5, page. 273 - 278, 2021-09
- Files in This Item:
- There are no files associated with this item.
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.