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dc.contributor.author이동국-
dc.date.accessioned2022-03-29T03:21:43Z-
dc.date.available2022-03-29T03:21:43Z-
dc.date.issued2019-
dc.identifier.otherOAK-2015-08824-
dc.identifier.urihttp://postech.dcollection.net/common/orgView/200000178596ko_KR
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/111629-
dc.descriptionMaster-
dc.description.abstractGraphene, which consists of a single atomic layer of carbon atoms, has been attracting great attention as a base material for next-generation electronic devices. It is essential to grow highquality graphene in a large area in order to realize graphene-based electronic devices for mass production. One of the methods is to grow graphene from a single crystalline 4H SiC(0001) substrate, which is known as a method for large-scale growth. In this method we can get graphene in a large area. Also, because of a wide band gap of SiC, graphene doesn`t have to be transferred to other substrates like SiO2.-
dc.languagekor-
dc.publisher포항공과대학교-
dc.titleGraphene Growth and Optimizing Etching Process of SiC Substrates-
dc.typeThesis-
dc.contributor.college일반대학원 물리학과-
dc.date.degree2019- 2-

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