Transmission characteristics of multilayer structure in the soft x-ray spectral region and its application to the design of quarter-wave plates at 13 and 4.4 nm
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SCOPUS
- Title
- Transmission characteristics of multilayer structure in the soft x-ray spectral region and its application to the design of quarter-wave plates at 13 and 4.4 nm
- Authors
- Kim, DE; Lee, SM; Jeon, IJ
- Date Issued
- 1999-03
- Publisher
- AMER INST PHYSICS
- Abstract
- The increasing usage of soft x-ray radiations due to the development of synchrotron radiation source and others demands varied optical manipulation in the soft x-ray spectral region. The phase manipulation is important because this leads to the control of the polarization state of a soft x-ray radiation. A new criterion for selecting material pairs for the maximum phase difference between the s and p polarization through a multilayer (ML) structure was proposed and tested theoretically. Transmission characteristics of ideal ML. structures in the soft x-ray spectral region have been studied by simulation. The results have been applied to optimize ML structures for quarter-wave plates at 4.4 and 13 nm. It was found that Rh/Si and Co/K MLs are good candidates for quarter-wave plates at 13 and 4.4 nm, respectively. (C) 1999 American Vacuum Society. [S0734-2101(99)01202-6].
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/11213
- DOI
- 10.1116/1.581599
- ISSN
- 0734-2101
- Article Type
- Article
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, vol. 17, no. 2, page. 398 - 402, 1999-03
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