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3D proximity-field Nanopattering Control based on Particle swarm Optimization

Title
3D proximity-field Nanopattering Control based on Particle swarm Optimization
Authors
Lee ChihunRho Junsuk
Date Issued
2022-05-20
Publisher
대한기계학회
URI
https://oasis.postech.ac.kr/handle/2014.oak/112695
Article Type
Conference
Citation
대한기계학회 마이크로나노공학부문 2022년 춘계학술대회, 2022-05-20
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노준석RHO, JUNSUK
Dept of Mechanical Enginrg
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