Facile fabrication of a rigid and chemically resistant micromixer system from photocurable inorganic polymer by static liquid photolithography (SLP)
SCIE
SCOPUS
- Title
- Facile fabrication of a rigid and chemically resistant micromixer system from photocurable inorganic polymer by static liquid photolithography (SLP)
- Authors
- Fang, QL; Kim, DP; Li, XD; Yoon, TH; Li, YH
- Date Issued
- 2011-08
- Publisher
- ROYAL SOC CHEMISTRY
- Abstract
- Highly effective mixing in microchannels is important for most chemical reactions conducted in microfluidic chips. To obtain a rigid and chemically resistant micromixer system at low cost, we fabricated a Y-shaped microchannel with built-in mixer structures by static liquid photolithography (SLP) from methacrylated polyvinylsilazane (MPVSZ) as an inorganic polymer photoresist which was then converted to a silicate phase by hydrolysis in vaporized ammonia atmosphere at 80 degrees C. The microchannel incorporating herringbone mixer structures was bonded with a matching polydimethylsiloxane (PDMS) open channel which was pre-coated by perhydropolysilazane (PHPS)-based mixture, and finally treated by additional hydrolysis at room temperature to convert the PHPS layer to a silica phase. Finally, the chemical resistance of the microfluidic system with embedded micromixer was confirmed with various solvents, and the excellent mixing performance in a short mixing length of 2.3 cm was demonstrated by injecting two different colored fluids into the microchannel.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/11326
- DOI
- 10.1039/C1LC20118B
- ISSN
- 1473-0197
- Article Type
- Article
- Citation
- LAB ON A CHIP, vol. 11, no. 16, page. 2779 - 2784, 2011-08
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