CMOS 이미지 센서를 위한 나노홀 칼라필터

Abstract

We designed nanohole color filters to replace imperfect color filters of CMOS image sensors (CIS). We analyzed a wavelength-selective transmission property of nanohole structures through the theory of frequency selective surfaces (FSS). Using three-dimensional finite-difference time-domain (FDTD) analysis, we designed several types of nanohole color filters and evaluated their optical characteristics. We applied the designed nanohole color filters to a Hynix 1.4-μm CIS structure and performed three-dimensional FDTD simulation. The optical properties of the CIS structures using the designed nanohole color filters were evaluated. In this paper, we represented new design concepts about nanohole color filters which can replace imperfect color filters of the CIS. Our results and proposed concepts for the nanohole color filters will be useful for the CIS industry, and significantly reduce the cost of CIS modules.