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Direct growth of wafer scale hexagonal boron nitride on silicon dioxide by MOCVD for integration of Si-based electronics

Title
Direct growth of wafer scale hexagonal boron nitride on silicon dioxide by MOCVD for integration of Si-based electronics
Authors
KIM, JONG KYU
Date Issued
2022-05-24
Publisher
Korea Society of LEDs and Optoelectronics (KSLOE)
URI
https://oasis.postech.ac.kr/handle/2014.oak/115745
Article Type
Conference
Citation
The 5th International Workshop on Ultraviolet Materials and Devices (IWUMD 2022), 2022-05-24
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김종규KIM, JONG KYU
Dept of Materials Science & Enginrg
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