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Green laser를 이용한 ALD-HZO 강유전체 특성 구현 연구
- Title
- Green laser를 이용한 ALD-HZO 강유전체 특성 구현 연구
- Authors
- LEE, BYOUNG HUN
- Date Issued
- 2023-02-15
- Publisher
- 한국반도체산업협회
- Article Type
- Conference
- Citation
- 제30회 한국반도체학술대회(KCS), 2023-02-15
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