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dc.contributor.authorJANGSEOP, LEE-
dc.contributor.authorKIM, SEONGHUN-
dc.contributor.authorLEE, SANGMIN-
dc.contributor.authorSANGHYUN, BAN-
dc.contributor.authorSEONGJAE, HEO-
dc.contributor.authorLee, Donghwa-
dc.contributor.authorMosendz, Oleksandr-
dc.contributor.authorHwang, Hyunsang-
dc.date.accessioned2023-03-03T00:26:17Z-
dc.date.available2023-03-03T00:26:17Z-
dc.date.created2023-03-02-
dc.date.issued2022-06-15-
dc.identifier.urihttps://oasis.postech.ac.kr/handle/2014.oak/116387-
dc.description.abstractTo improve the reliability of a nanoscale (d=30 nm) ovonic threshold switching (OTS) selector, we report for the first time the effect of microwave annealing (MWA) on the electrical characteristics of an OTS device. The MWA-treated OTS device shows low initial forming voltage, excellent endurance (> 1011), and reduced threshold voltage (Vth) drift (- 67 %), while maintaining its great switching characteristics (Ioff = 0.8 nA at 1.1 V). Enhanced As-Te bonding probability after MWA, which was confirmed by Raman spectroscopy and density functional theory (DFT) calculations, can explain low forming voltage and improved device reliability.-
dc.languageEnglish-
dc.publisherInstitute of Electrical and Electronics Engineers Inc.-
dc.relation.isPartOf2022 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2022-
dc.relation.isPartOfDigest of Technical Papers - Symposium on VLSI Technology-
dc.titleImproving the SiGeAsTe Ovonic Threshold Switching (OTS) Characteristics by Microwave Annealing for Excellent Endurance (> 1011) and Low Drift Characteristics-
dc.typeConference-
dc.type.rimsCONF-
dc.identifier.bibliographicCitation2022 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2022, pp.320 - 321-
dc.citation.conferenceDate2022-06-12-
dc.citation.conferencePlaceUS-
dc.citation.endPage321-
dc.citation.startPage320-
dc.citation.title2022 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2022-
dc.contributor.affiliatedAuthorJANGSEOP, LEE-
dc.contributor.affiliatedAuthorKIM, SEONGHUN-
dc.contributor.affiliatedAuthorLEE, SANGMIN-
dc.contributor.affiliatedAuthorSANGHYUN, BAN-
dc.contributor.affiliatedAuthorSEONGJAE, HEO-
dc.contributor.affiliatedAuthorLee, Donghwa-
dc.contributor.affiliatedAuthorHwang, Hyunsang-
dc.identifier.scopusid2-s2.0-85135223431-
dc.description.journalClass1-
dc.description.journalClass1-

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