DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, Ik-Soo | - |
dc.contributor.author | Shim, Chae-Eun | - |
dc.contributor.author | Kim, Sang Won | - |
dc.contributor.author | Lee, Chang-Seok | - |
dc.contributor.author | Kwon, Junyoung | - |
dc.contributor.author | Byun, Kyung-Eun | - |
dc.contributor.author | Jeong, Unyong | - |
dc.date.accessioned | 2023-07-11T01:46:08Z | - |
dc.date.available | 2023-07-11T01:46:08Z | - |
dc.date.created | 2022-12-28 | - |
dc.date.issued | 2022-01 | - |
dc.identifier.issn | 0935-9648 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/117923 | - |
dc.description.abstract | © 2022 Wiley-VCH GmbH.While various crystalline carbon allotropes, including graphene, have been actively investigated, amorphous carbon (a-C) thin films have received relatively little attention. The a-C is a disordered form of carbon bonding with a broad range of the CC bond length and bond angle. Although accurate structural analysis and theoretical approaches are still insufficient, reproducible structure–property relationships have been accumulated. As the a-C thin film is now adapted as a hardmask in the semiconductor industry and new properties are reported continuously, expectations are growing that it can be practically used as active materials beyond as a simple sacrificial layer. In this perspective review article, after a brief introduction to the synthesis and properties of the a-C thin films, their potential practical applications are proposed, including hardmasks, extreme ultraviolet (EUV) pellicles, diffusion barriers, deformable electrodes and interconnects, sensors, active layers, electrodes for energy, micro-supercapacitors, batteries, nanogenerators, electromagnetic interference (EMI) shielding, and nanomembranes. The article ends with a discussion on the technological challenges in a-C thin films. | - |
dc.language | English | - |
dc.publisher | John Wiley and Sons Inc | - |
dc.relation.isPartOf | Advanced Materials | - |
dc.title | Amorphous Carbon Films for Electronic Applications | - |
dc.type | Article | - |
dc.identifier.doi | 10.1002/adma.202204912 | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | Advanced Materials | - |
dc.identifier.wosid | 000888313900001 | - |
dc.citation.title | Advanced Materials | - |
dc.contributor.affiliatedAuthor | Kim, Ik-Soo | - |
dc.contributor.affiliatedAuthor | Shim, Chae-Eun | - |
dc.contributor.affiliatedAuthor | Jeong, Unyong | - |
dc.identifier.scopusid | 2-s2.0-85142250591 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.isOpenAccess | N | - |
dc.type.docType | Article; Early Access | - |
dc.subject.keywordPlus | DIAMOND-LIKE CARBON | - |
dc.subject.keywordPlus | NITRIDE THIN-FILMS | - |
dc.subject.keywordPlus | TO-ROLL PRODUCTION | - |
dc.subject.keywordPlus | ELECTRICAL-PROPERTIES | - |
dc.subject.keywordPlus | GRAPHENE FILMS | - |
dc.subject.keywordPlus | BIPOLAR PLATES | - |
dc.subject.keywordPlus | DEPOSITION | - |
dc.subject.keywordPlus | TEMPERATURE | - |
dc.subject.keywordPlus | PERFORMANCE | - |
dc.subject.keywordPlus | DENSITY | - |
dc.subject.keywordAuthor | amorphous carbon | - |
dc.subject.keywordAuthor | electronic applications | - |
dc.subject.keywordAuthor | nanomembrane | - |
dc.subject.keywordAuthor | thin films | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Nanoscience & Nanotechnology | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
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