11.3~13.6-GHz Cryo-CMOS 4P4T RF switch for Superconducting Quantum Computer at mK Temperature

Abstract

In this paper, we present a 4P4T RF switch for cryogenic qubit quantum computers. The limitations of the conventional Series-Shunt RF switch were mathematically described and the structure of the new switch was presented. In order to prove infinite scalability with the structure, a 4P4T switch was manufactured by configuring a shared matching network in a series-based switch. In addition, a 2x4 decoder of DC 3.6 uW of power consumption was designed to reduce the number of DC voltages. To check validity, simulations were performed with ADS, Cadence and HFSS. To fabricate the chip, the process used is 65-nm bulk CMOS and the chip die size is 1mm^2. After mounting the designed chip on the PCB, TRL de-embedding was performed. We measured at dilution refrigerator (600 mK) to demonstrate operation. In measurement results, the performance of switch is minimum insertion Loss is 0.07dB, maximum isolation is 50.2dB, and Bandwidth is 2.3 GHz at 600mK.