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A Study on Thin Film Coating and Properties of Transparent and Hydrophobic Dielectric Layer Using Cyclic Olefin Copolymer (COC)
- Title
- A Study on Thin Film Coating and Properties of Transparent and Hydrophobic Dielectric Layer Using Cyclic Olefin Copolymer (COC)
- Authors
- KIM, JOON WON; DONG, WOO YOO; KIM, SANGMOK
- Date Issued
- 2023-03-22
- Publisher
- (사)마이크로나노시스템학회
- Article Type
- Conference
- Citation
- The 25th Korean MEMS Conference, 2023-03-22
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Related Researcher
- 김준원KIM, JOON WON
- Dept of Mechanical Enginrg