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Analysis of Mechanical Stress on Charge Trap Nitride (CTN) for Program Operation in 3D NAND Flash Memory
- Title
- Analysis of Mechanical Stress on Charge Trap Nitride (CTN) for Program Operation in 3D NAND Flash Memory
- Authors
- BAEK, ROCK HYUN; DONG, HYUN KIM; 남기훈; 박찬양; 양기호; 정진수; 이상욱; 임재완
- Date Issued
- 2023-02-15
- Publisher
- KCS
- Article Type
- Conference
- Citation
- 제 30회 한국반도체학술대회, 2023-02-15
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Related Researcher
- 백록현BAEK, ROCK HYUN
- Dept of Electrical Enginrg