DC Field | Value | Language |
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dc.contributor.author | SANGHYUN, BAN | - |
dc.contributor.author | JANGSEOP, LEE | - |
dc.contributor.author | Kim, Taehoon | - |
dc.contributor.author | Hwang, Hyunsang | - |
dc.date.accessioned | 2024-03-05T09:11:14Z | - |
dc.date.available | 2024-03-05T09:11:14Z | - |
dc.date.created | 2024-03-04 | - |
dc.date.issued | 2023-06-14 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/121032 | - |
dc.description.abstract | For the application of a high-density, low-cost 3D vertical X-point array (V-XPA), we report the characteristics of the atomic layer deposition (ALD) available simple In-Te binary ovonic threshold switch (OTS) and its combination with an HfOx buffer layer. In-Te binary OTS exhibited a highly stable threshold voltage (Vth) and low delta firing voltage (Δ Vff=Vff-Vth) with a low off-leakage current (Ioff) of several nanoamperes, which are the essential requirements for a mega-array. To reduce the high Ioff of the V-XPA, which originates from the perimeter shape selector area, a sub-nanometer ultrathin HfOx buffer layer was successfully applied for the current confinement, yielding an excellent Ioff of 1 nA when combined with the In-Te binary OTS. | - |
dc.language | English | - |
dc.publisher | Institute of Electrical and Electronics Engineers Inc. | - |
dc.relation.isPartOf | 2023 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2023 | - |
dc.relation.isPartOf | Digest of Technical Papers - Symposium on VLSI Technology | - |
dc.title | Simple Binary In-Te OTS with Sub-nm HfOxBuffer Layer for 3D Vertical X-point Memory Applications | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.identifier.bibliographicCitation | 2023 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2023 | - |
dc.citation.conferenceDate | 2023-06-11 | - |
dc.citation.conferencePlace | JA | - |
dc.citation.title | 2023 IEEE Symposium on VLSI Technology and Circuits, VLSI Technology and Circuits 2023 | - |
dc.contributor.affiliatedAuthor | SANGHYUN, BAN | - |
dc.contributor.affiliatedAuthor | JANGSEOP, LEE | - |
dc.contributor.affiliatedAuthor | Hwang, Hyunsang | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
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