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TiO2 interlayer를 이용한 Al/ZnO 접촉저항 개선

Title
TiO2 interlayer를 이용한 Al/ZnO 접촉저항 개선
Authors
윤성빈김기영이해원MINJAE, KIM황현준LEE, BYOUNG HUN
Date Issued
2024-01-25
Publisher
포스텍, 한국반도체산업협회, 한국반도체연구조합
URI
https://oasis.postech.ac.kr/handle/2014.oak/121208
Article Type
Conference
Citation
THE 31ST KOREAN CONFERENCE ON SEMICONDUCTORS(KSC 2024), 2024-01-25
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황현준HWANG, HYEON JUN
Dept of Electrical Enginrg
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