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Guided domino lithography for uniform ultra-sharp nanoantenna arrays

Title
Guided domino lithography for uniform ultra-sharp nanoantenna arrays
Authors
Oh, Dong KyoKim, JaekyungLee, JihaeRHO, JUNSUK
Date Issued
2023-09-27
Publisher
Micro resist technology, AMO GmbH
URI
https://oasis.postech.ac.kr/handle/2014.oak/121486
Article Type
Conference
Citation
Micro and Nano Engineering (MNE), 2023-09-27
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노준석RHO, JUNSUK
Dept of Mechanical Enginrg
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