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Enhancing the Thermal Stability of the IGZO Transistors by Suppressing the Oxygen Diffusion into Metal Using Self-Assembled Monolayer for Nanoscale Devices

Title
Enhancing the Thermal Stability of the IGZO Transistors by Suppressing the Oxygen Diffusion into Metal Using Self-Assembled Monolayer for Nanoscale Devices
Authors
JUYOUNG, YUNPARK, HYUKSEUNG, MO KIMLEE, BYOUNG HUNCHUNG, YOONYOUNG
Date Issued
2023-04-13
Publisher
MATERIALS REAEARCH SOCIETY
URI
https://oasis.postech.ac.kr/handle/2014.oak/122027
Article Type
Conference
Citation
MRS Spring Meeting, 2023-04-13
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정윤영CHUNG, YOONYOUNG
Dept of Electrical Enginrg
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