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High Performance Thin Film Capacitor by Plasma-Assisted ALA
- Title
- High Performance Thin Film Capacitor by Plasma-Assisted ALA
- Authors
- AN, JIHWAN
- Date Issued
- 2023-11-21
- Publisher
- 한국반도체디스플레이학회
- Article Type
- Conference
- Citation
- Korean International Semiconductor Conference on Manufacturing Technology 2023 (KISM 2023), 2023-11-21
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Related Researcher
- 안지환AN, JIHWAN
- Dept of Mechanical Enginrg