Development of Multimodal Active-Matrix Sensor Arrays and Their Applications

Abstract

With the rapid development of the Internet of Things and artificial intelligence technologies, flexible sensors are required to detect multiple stimuli over a large area. The requirements have been achieved by the demonstration of multimodal sensor arrays. With the decoupled sensing mechanisms, various sensor arrays have shown their possibility for multi-sensing applications. However, active-matrix sensor arrays have been rarely investigated, though an active-matrix backplane contributes to the reduction of crosstalk. In this thesis, a multimodal active-matrix sensor arrays are proposed. As the first step of the development of an active-matrix sensor array, the uniformity of thin-film transistors (TFTs) is improved by controlling crystal growth of small-molecule semiconductors. Second, three required technologies are proposed to transform TFT arrays into active-matrix backplanes. Third, multimodal sensor arrays based on 3D-stacked active-matrix backplanes are presented. The sensor array detects temperature and pressure without cross-sensitivity. Finally, the multimodal active-matrix sensor arrays are used to demonstrate a robotic system that can grip and lift up a cup regardless of temperature. This multimodal sensor array will offer broad potential in electronic skin applications.