High-Resolution Soft X-ray Digital In-Line Holographic Microscopy

Abstract

High-spatial-resolution soft X-ray digital in-line holographic microscopy was developed. The scheme uses highly coherent and divergent lights generated by a combination of a Fresnel zone plate (FZP) and a pinhole of 200 nm radius with incidence incoherent lights tightly focused on the pinhole. At a wavelength of 2.38 nm, objects such as a carbon powder particle and a gold pattern were imaged with a spatial resolution of similar to 200 nm. It approached the theoretically achievable resolution (i.e., the pinhole's radius) of typical pinhole-based in-line holographic microscopy. It is better than the previously reported best result by a factor of 2. (C) 2011 The Japan Society of Applied Physics