Fabrication of Mutilayered Microgear Using a Vertically Modularized and Sectioned Micromold System by X-ray Micromachining Process
SCIE
SCOPUS
- Title
- Fabrication of Mutilayered Microgear Using a Vertically Modularized and Sectioned Micromold System by X-ray Micromachining Process
- Authors
- Kim, JH; Chang, SS; Lim, G; Lee, BK
- Date Issued
- 2011-06
- Publisher
- JAPAN SOC APPLIED PHYSICS
- Abstract
- In the present study, a vertically modularized and sectioned micromold system (v-MSMS) is proposed and developed by synchrotron X-ray micromachining process. The developed v-MSMS is a novel concept of constructing a micromold system by stacking several micromold modules. As one representative application of the present v-MSMS, micromold system with several kinds of spur gear patterns was fabricated using deep X-ray lithography and a subsequent nickel electroforming process. Then, the usefulness of v-MSMS was demonstrated by casting the microgear with multiple layers. The proposed technique can be a useful tool for the mass replication of multilayered mechanical components, various micro parts, complicated microstructures, and so on. (C) 2011 The Japan Society of Applied Physics
- Keywords
- THERMOPLASTIC POLYMERS; MOLD FABRICATION; LIGA PROCESS; MICROFABRICATION; MICROSTRUCTURES; INSERTS; BEAM
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/17238
- DOI
- 10.1143/JJAP.50.06GM11
- ISSN
- 0021-4922
- Article Type
- Article
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS, vol. 50, no. 6, 2011-06
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- There are no files associated with this item.
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