Fabrication of hyperboloid-drum structure for electrically pumped laser of sub-micrometer to nanometer diameter active areas
SCIE
SCOPUS
- Title
- Fabrication of hyperboloid-drum structure for electrically pumped laser of sub-micrometer to nanometer diameter active areas
- Authors
- Kim, JY; An, SJ; Kim, J; Lee, JW; Kang, BK; Kwon, OD
- Date Issued
- 2004-03
- Publisher
- A V S AMER INST PHYSICS
- Abstract
- This article proposes a method of fabricating a hyperboloid-drum structure, which can be applied to an electrically pumped laser with an active-layer diameter as small as 100 nm, while maintaining a wide contact area for easy electrical connection. The structure is fabricated using conventional photolithography and the chemically assisted ion-beam etching (CAIBE) process with an Ar:Cl-2:BCl3 = 5:2:3 gas mixture. The process conditions for CAIBE and the size of etch mask are adjusted to obtain the required structure with a height of similar to8 mum, an active layer diameter of 0.1-2.0 mum, and a contact diameter larger than 4 mum. It is demonstrated that a laser device with an active layer diameter as small as 600 nm and a contact layer diameter of similar to5 mum can also be fabricated with the proposed method. (C) 2004 American Vacuum Society.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/17962
- DOI
- 10.1116/1.1676485
- ISSN
- 1071-1023
- Article Type
- Article
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, vol. 22, no. 2, page. 673 - 677, 2004-03
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