Development of a micro-opto-mechanical accelerometer based on intensity modulation
SCIE
SCOPUS
- Title
- Development of a micro-opto-mechanical accelerometer based on intensity modulation
- Authors
- Lee, SJ; Cho, DW
- Date Issued
- 2004-01
- Publisher
- SPRINGER-VERLAG
- Abstract
- Accelerometers are most frequently used to monitor machining states, and are therefore crucial for automated and unmanned plant operations. In such a harsh environment, micro-accelerometers based on optical methods can be effective. This paper presents a new type of micro-opto-mechanical accelerometer that was developed using a combination of new technologies, such as deep reactive ion etching (DRIE), micro-stereolithography, and intensity modulation. The advantages of intensity modulation include the simplicity of the detection principle and the lack of a requirement for a high-quality light source. This paper reports the design of two types of micro-accelerometer using the finite element method. Experiments showed that the fabricated micro-accelerometers had resonant frequencies of approximately 2 and 10 kHz, with suitable linear ranges and sensitivities. The developed micro-opto-mechanical accelerometers can thus be used for various practical purposes, including machining state monitoring in automated and unmanned plant operations.
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/18153
- DOI
- 10.1007/s00542-003-0324-9
- ISSN
- 0946-7076
- Article Type
- Article
- Citation
- MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS, vol. 10, no. 2, page. 147 - 154, 2004-01
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