Real-time synchrotron x-ray scattering study of an epitaxial BaTiO3 thin film during heating

Abstract

An epitaxial BaTiO3 film with 290-nm thickness was prepared on a MgO(001) single-crystal substrate by radio-frequency magnetron sputter deposition. The structural characteristics of the film were studied as a function of temperature in in situ, real-time synchroton x-ray scattering experiments. We found that the as-grown film was strained at room temperature and tetragonally distorted with the c axis normal to the film surface. Interestingly, its lattice parameters were found to be expanded 1.28% and 0.64% in both the in-plane and the out-of-plane directions, respectively (i.e., biaxially), comparing to those of a bulk BaTiO3. More importantly, as it was heated to 600 degrees C, the tetragonal structure was kept up without the phase transition, which is usually observed in other epitaxial ferroelectric thin films.