The development and application of imaging EXAFS spectromicroscopy
SCIE
SCOPUS
- Title
- The development and application of imaging EXAFS spectromicroscopy
- Authors
- Hwu, Y; Tsai, WL; Chang, LW; Chen, CH; Wu, CC; Noh, DY; Je, JH; Fecher, GH; Bertolo, M; Berger, H; Margaritondo, G
- Date Issued
- 1999-01
- Publisher
- JAPAN J APPLIED PHYSICS
- Abstract
- The capability to perform absorption spectroscopy with hard x-rays was added to the synchrotron imaging spectromicroscopy technique. We present several successful test cases. First, the EXAFS (extended x-ray absorption fine structure) analysis was implemented in areas as small as few mu m(2) for transition-metal K edge absorption spectra. The corresponding structural information was complemented by chemical information from the near-edge region. Specifically, in the case of a cross-sectional cut steel different Fe oxidation states were found at different depths. Tests on a PVD grown TiN film revealed areas with oxidized Ti. Overall, these tests demonstrate the feasibility of combining structural and chemicals analysis with hard x ray absorption and high lateral resolution.
- Keywords
- synchrotron spectromicroscopy; EXAFS microscopy; SPECTROSCOPY; OXIDATION
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/20262
- DOI
- 10.7567/JJAPS.38S1.646
- ISSN
- 0021-4922
- Article Type
- Article
- Citation
- JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, vol. 38, page. 646 - 649, 1999-01
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