DC Field | Value | Language |
---|---|---|
dc.contributor.author | Kim, DE | - |
dc.contributor.author | Lee, SM | - |
dc.contributor.author | Jeon, IJ | - |
dc.contributor.author | Yanagihara, M | - |
dc.date.accessioned | 2016-03-31T13:53:11Z | - |
dc.date.available | 2016-03-31T13:53:11Z | - |
dc.date.created | 2009-08-20 | - |
dc.date.issued | 1998-05 | - |
dc.identifier.issn | 0169-4332 | - |
dc.identifier.other | 1998-OAK-0000000229 | - |
dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/20768 | - |
dc.description.abstract | A Mo/Si multilayer (ML) has been fabricated as a reflector in the soft X-ray spectral region by pulsed laser deposition (PLD), using the second harmonic of Nd/YAG pulsed laser (5 ns, 532 nm light). The ML structure was characterized by transmission electron microscopy (TEM), small-angle X-ray scattering (SAXS) and photoelectron spectroscopy for chemical analysis (ESCA). The near-normal incidence reflectivity in the spectral range of 14-17 nm was measured using a soft X-ray reflectometer based on a laser-produced plasma. The structural parameters were evaluated by fitting to both the SAXS profile and the soft X-ray reflectance measurement with asymmetric interface profile, roughness and composition taken into account. (C) 1998 Elsevier Science B.V. | - |
dc.description.statementofresponsibility | X | - |
dc.language | English | - |
dc.publisher | ELSEVIER SCIENCE BV | - |
dc.relation.isPartOf | APPLIED SURFACE SCIENCE | - |
dc.subject | pulsed laser deposition | - |
dc.subject | multilayer | - |
dc.subject | soft X-ray reflectivity | - |
dc.subject | small-angle X-ray scattering | - |
dc.subject | EXTREME-ULTRAVIOLET | - |
dc.subject | MIRRORS | - |
dc.subject | MICROSCOPY | - |
dc.title | Characterization of a multilayer soft X-ray reflector fabricated by pulsed laser deposition | - |
dc.type | Article | - |
dc.contributor.college | 물리학과 | - |
dc.identifier.doi | 10.1016/S0169-4332(97)00699-5 | - |
dc.author.google | Kim, DE | - |
dc.author.google | Lee, SM | - |
dc.author.google | Jeon, IJ | - |
dc.author.google | Yanagihara, M | - |
dc.relation.volume | 127 | - |
dc.relation.startpage | 531 | - |
dc.relation.lastpage | 535 | - |
dc.contributor.id | 10075453 | - |
dc.relation.journal | APPLIED SURFACE SCIENCE | - |
dc.relation.index | SCI급, SCOPUS 등재논문 | - |
dc.relation.sci | SCI | - |
dc.collections.name | Conference Papers | - |
dc.type.rims | ART | - |
dc.identifier.bibliographicCitation | APPLIED SURFACE SCIENCE, v.127, pp.531 - 535 | - |
dc.identifier.wosid | 000073768100087 | - |
dc.date.tcdate | 2019-01-01 | - |
dc.citation.endPage | 535 | - |
dc.citation.startPage | 531 | - |
dc.citation.title | APPLIED SURFACE SCIENCE | - |
dc.citation.volume | 127 | - |
dc.contributor.affiliatedAuthor | Kim, DE | - |
dc.identifier.scopusid | 2-s2.0-0032070527 | - |
dc.description.journalClass | 1 | - |
dc.description.journalClass | 1 | - |
dc.description.wostc | 9 | - |
dc.type.docType | Article; Proceedings Paper | - |
dc.subject.keywordPlus | EXTREME-ULTRAVIOLET | - |
dc.subject.keywordPlus | MIRRORS | - |
dc.subject.keywordPlus | MICROSCOPY | - |
dc.subject.keywordAuthor | pulsed laser deposition | - |
dc.subject.keywordAuthor | multilayer | - |
dc.subject.keywordAuthor | soft X-ray reflectivity | - |
dc.subject.keywordAuthor | small-angle X-ray scattering | - |
dc.relation.journalWebOfScienceCategory | Chemistry, Physical | - |
dc.relation.journalWebOfScienceCategory | Materials Science, Coatings & Films | - |
dc.relation.journalWebOfScienceCategory | Physics, Applied | - |
dc.relation.journalWebOfScienceCategory | Physics, Condensed Matter | - |
dc.description.journalRegisteredClass | scie | - |
dc.description.journalRegisteredClass | scopus | - |
dc.relation.journalResearchArea | Chemistry | - |
dc.relation.journalResearchArea | Materials Science | - |
dc.relation.journalResearchArea | Physics | - |
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