Nonspecular x-ray-reflectivity study of partially correlated interface roughness of a Mo/Si multilayer
SCIE
SCOPUS
- Title
- Nonspecular x-ray-reflectivity study of partially correlated interface roughness of a Mo/Si multilayer
- Authors
- Lee, DR; Park, YJ; Kim, D; Jeong, YH; Lee, KB
- Date Issued
- 1998-04-15
- Publisher
- AMERICAN PHYSICAL SOC
- Abstract
- Nonspecular x-ray-reflectivity intensities were measured to characterize the interface morphology of a Mo/Si multilayer. Longitudinal off-specular scans and transverse scans at several multilayer peaks and valleys were carried out. For the analysis of the experimental data, a height cross-correlation function between different interfaces was derived for a model multilayer whose interfaces are partially correlated. The parameters related to the interface morphology were obtained by fitting the measured intensities within the distorted-wave Born approximation. The intermixing widths of the graded interfaces, the correlated interface roughness amplitude, and a vertical correlation length were obtained by analyzing the off-specular intensities. [S0163-1829(98)04615-3].
- URI
- https://oasis.postech.ac.kr/handle/2014.oak/20806
- DOI
- 10.1103/PhysRevB.57.8786
- ISSN
- 0163-1829
- Article Type
- Article
- Citation
- PHYSICAL REVIEW B, vol. 57, no. 15, page. 8786 - 8789, 1998-04-15
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