Article
Cited 5 time in 
Cited 7 time in 
Cited 7 time in
Metadata Downloads
Full metadata record
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Park, JC | - |
| dc.contributor.author | Kang, B | - |
| dc.date.accessioned | 2016-03-31T13:57:20Z | - |
| dc.date.available | 2016-03-31T13:57:20Z | - |
| dc.date.created | 2009-02-28 | - |
| dc.date.issued | 1997-12 | - |
| dc.identifier.issn | 0093-3813 | - |
| dc.identifier.other | 1998-OAK-0000000054 | - |
| dc.identifier.uri | https://oasis.postech.ac.kr/handle/2014.oak/20895 | - |
| dc.description.abstract | Modeling and measurement results of the RF input impedance of a helical resonator discharge are given. A simple microstrip transmission line model is used to extract an equivalent circuit of a helical resonator discharge. The transmission line model consists of a grounded cylinder for RF shielding, a helical copper coil for RF heating, and a high density plasma, Transmission line parameters for an experimental helical resonator discharge chamber are extracted, and the results are compared with the measured results. The measured transmission line parameters for the experimental reactor are the characteristic impedance of 200 Omega, the attenuation constant of 6 x 10(-3) Np/m, and the wave number of 0.36 rad/m, which have good agreement with the calculated values. | - |
| dc.description.statementofresponsibility | X | - |
| dc.language | English | - |
| dc.publisher | IEEE-INST ELECTRICAL ELECTRONICS ENGI | - |
| dc.relation.isPartOf | IEEE TRANSACTIONS ON PLASMA SCIENCE | - |
| dc.subject | helical resonator | - |
| dc.subject | high density plasma science | - |
| dc.subject | impedance model | - |
| dc.subject | RF discharge | - |
| dc.subject | PLASMA SOURCE | - |
| dc.subject | FREQUENCY | - |
| dc.title | Impedance model of helical resonator discharge | - |
| dc.type | Article | - |
| dc.contributor.college | 전자전기공학과 | - |
| dc.identifier.doi | 10.1109/27.650909 | - |
| dc.author.google | PARK, JC | - |
| dc.author.google | KANG, B | - |
| dc.relation.volume | 25 | - |
| dc.relation.issue | 6 | - |
| dc.relation.startpage | 1398 | - |
| dc.relation.lastpage | 1405 | - |
| dc.contributor.id | 10071834 | - |
| dc.relation.journal | IEEE TRANSACTIONS ON PLASMA SCIENCE | - |
| dc.relation.index | SCI급, SCOPUS 등재논문 | - |
| dc.relation.sci | SCI | - |
| dc.collections.name | Journal Papers | - |
| dc.type.rims | ART | - |
| dc.identifier.bibliographicCitation | IEEE TRANSACTIONS ON PLASMA SCIENCE, v.25, no.6, pp.1398 - 1405 | - |
| dc.identifier.wosid | 000071615900016 | - |
| dc.date.tcdate | 2019-01-01 | - |
| dc.citation.endPage | 1405 | - |
| dc.citation.number | 6 | - |
| dc.citation.startPage | 1398 | - |
| dc.citation.title | IEEE TRANSACTIONS ON PLASMA SCIENCE | - |
| dc.citation.volume | 25 | - |
| dc.contributor.affiliatedAuthor | Kang, B | - |
| dc.identifier.scopusid | 2-s2.0-0031364989 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalClass | 1 | - |
| dc.description.wostc | 4 | - |
| dc.type.docType | Article | - |
| dc.subject.keywordAuthor | helical resonator | - |
| dc.subject.keywordAuthor | high density plasma science | - |
| dc.subject.keywordAuthor | impedance model | - |
| dc.subject.keywordAuthor | RF discharge | - |
| dc.relation.journalWebOfScienceCategory | Physics, Fluids & Plasmas | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Physics | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.
Communities & Collection
Related Researcher
- 강봉구KANG, BONG KOO
- Dept of Electrical Enginrg