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Chemical vapor deposition of barium strontium titanate films using a single mixture of metalorganic precursors SCIE SCOPUS
- Title
- Chemical vapor deposition of barium strontium titanate films using a single mixture of metalorganic precursors
- Date Issued
- 1999-09
- Publisher
- AMER INST PHYSICS
- Keywords
- THIN-FILMS; GROWTH
- ISSN
- 0734-2101
- Article Type
- Article
- Citation
- JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, vol. 17, no. 5, page. 3115 - 3117, 1999-09
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